Gigaphoton Delivers Excimer Laser to the United States for Micro Via Processing [Yahoo! Finance]
KOMATSU LTD S/ADR (KMTUY)
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Source: Yahoo! Finance
lightsources for semiconductor lithography, announced that the "G300K" micro via processing lightsource has been delivered to a Japanese equipment manufacturer, specialized in backend equipment manufacturing and the integrated system has been successfully installed at the facility of a company in the United States. Gigaphoton has applied its expertise in semiconductor lithography lightsources to develop a lightsource for ultra-fine ablation processing for advanced packaging processes. The G300K, is an excimer laser based on KrF (248nm) wavelength, which is integrated into the processing equipment for semiconductor package substrates. It provides high power, high repetition rate, high reliability with long life modules. The excimer laser is primarily used in the process of creating micro-via holes with a diameter of 10µm or less, as well as trench patterns. It is expected to be adopted for the manufacturing of 2.5D/3D packages utilizing chiplets, which are projected to increase pri
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